Epitaxial film growth by thermal laser evaporation
نویسندگان
چکیده
We demonstrate the epitaxial growth of thin films by thermal laser evaporation. Epitaxial metal oxide are grown evaporating Ni, V, and Ru elemental sources in a variety oxygen-ozone atmospheres on laser-heated substrates. This results NiO (111), VO2 (M1) (020), RuO2 (110) Al2O3 (0001) or MgO (100) The show well-defined crystallographic orientation relationships with substrates, as confirmed in-plane out-of-plane x-ray measurements. reveal potential epitaxy for ultrahigh-purity heterostructures.
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ژورنال
عنوان ژورنال: Journal of vacuum science & technology
سال: 2021
ISSN: ['2327-9877', '0734-211X']
DOI: https://doi.org/10.1116/6.0001177